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US Patent 11656273 High current device testing apparatus and systems

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 US Patent 11656273 High current device testing apparatus and systems

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Embodiments of the present invention provide systems and methods for performing automated device testing at high power using ATI-based thermal management that substantially mitigates or prevents the pads and pins thereof from being burned or damaged. In this way, the lifespan of the testing equipment is improved and the expected downtime of testing equipment is substantially reduced, while also reducing cost of operation.

Infobox
Is a
Patent
Patent
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116562730
Date of Patent
May 23, 2023
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Patent Application Number
175202020
Date Filed
November 5, 2021
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Patent Citations
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US Patent 7138811 Seals used for testing on an integrated circuit tester
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US Patent 7311782 Apparatus for active temperature control of susceptors
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US Patent 7355428 Active thermal control system with miniature liquid-cooled temperature control device for electronic device testing
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US Patent 7436059 Thermoelectric cooling device arrays
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US Patent 7519880 Burn-in using system-level test hardware
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US Patent 7659738 Test sockets having peltier elements, test equipment including the same and methods of testing semiconductor packages using the same
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US Patent 7726145 Temperature control unit for electronic component and handler apparatus
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US Patent 7755899 Miniaturized high conductivity thermal/electrical switch
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US Patent 7781883 Electronic package with a thermal interposer and method of manufacturing the same
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US Patent 8552540 Wafer level package with thermal pad for higher power dissipation
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US Patent 8558540 Method of measuring dimensionless coupling constant of magnetic structure
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US Patent 8772682 Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
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US Patent 8927907 Thermally zoned substrate holder assembly
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US Patent 9080820 Heat dissipation switch
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US Patent 9291667 Adaptive thermal control
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US Patent 9307578 System and method for monitoring temperatures of and controlling multiplexed heater array
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US Patent 9310145 Heat flow device
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US Patent 9494353 Temperature control equipment
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US Patent 9594113 Package on package thermal forcing device
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US Patent 10056225 Adjusting substrate temperature to improve CD uniformity
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US Patent 10126356 Systems and methods for conforming test tooling to integrated circuit device with whirlwind cold plate
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US Patent 10163668 Thermal dynamic response sensing systems for heaters
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US Patent 10354785 Passive thermal switch devices having thermal switch material that passively switches between a thermal insulating state and a thermal conducting state and vehicles having the same
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US Patent 10656200 High volume system level testing of devices with pop structures
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US Patent 10775408 System for testing devices inside of carriers
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US Patent 10908207 Systems and methods for conforming device testers to integrated circuit device with pressure relief valve
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US Patent 10955466 Environment control apparatus
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US Patent 10983145 System for testing devices inside of carriers
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Patent Primary Examiner
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Tung X Nguyen
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CPC Code
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G01R 31/2874
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G01R 31/2877
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G01R 31/2875
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