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US Patent 7726145 Temperature control unit for electronic component and handler apparatus

Patent 7726145 was granted and assigned to Seiko Epson on June, 2010 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee
Seiko Epson
Seiko Epson
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
7726145
Date of Patent
June 1, 2010
Patent Application Number
11518613
Date Filed
September 8, 2006
Patent Citations Received
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US Patent 11754620 DUT placement and handling for active thermal interposer device
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US Patent 11841392 Integrated test cell using active thermal interposer (ATI) with parallel socket actuation
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US Patent 11774492 Test system including active thermal interposer device
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US Patent 11940487 Thermal solution for massively parallel testing
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US Patent 11852678 Multi-input multi-zone thermal control for device testing
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US Patent 11656273 High current device testing apparatus and systems
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US Patent 11674999 Wafer scale active thermal interposer for device testing
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Patent Primary Examiner
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Marc E. Norman
Patent abstract

A temperature control unit for an electronic component and a handler apparatus, which are excellent in responsibility during cooling and heating, is obtained. The temperature control unit for an electronic component includes a cooling cycle device having a refrigerant passage circulating through a compressor, a condenser, an expander, and an evaporator; a thermally conductive block having an outer surface capable of coming in contact with the electronic component that is an object to be temperature-controlled, where an inner surface corresponding to the outer surface is placed opposite to the outer surface so as to be brought in contact with or apart from the evaporator; at least one first heater for heating the thermally conductive block; and a compressed air feeding circuit for feeding compressed air between facing surfaces of the evaporator and the thermally conductive block to part them.

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