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US Patent 11525184 Dual selective deposition

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Date Filed
May 27, 2021
Date of Patent
December 13, 2022
Patent Application Number
17331971
Patent Citations
‌
US Patent 10047435 Dual selective deposition
‌
US Patent 10049924 Selective formation of metallic films on metallic surfaces
‌
US Patent 10115603 Removal of surface passivation
‌
US Patent 10157786 Selective formation of metallic films on metallic surfaces
‌
US Patent 10186420 Formation of silicon-containing thin films
‌
US Patent 10204782 Combined anneal and selective deposition process
‌
US Patent 10343186 Vapor phase deposition of organic films
‌
US Patent 10373820 Deposition of organic films
‌
US Patent 10428421 Selective deposition on metal or metallic surfaces relative to dielectric surfaces
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US Patent 10443123 Dual selective deposition
•••
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11525184
Patent Primary Examiner
‌
Elizabeth A Burkhart
CPC Code
‌
C23C 16/45525
‌
C23C 16/18
‌
C23C 16/402
‌
C23C 16/06
‌
C23C 16/04

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