US Patent 11360399 Metrology sensor for position metrology

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Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

11360399

Date of Patent

June 14, 2022

Patent Application Number

17277353

Date Filed

August 27, 2019

Patent Citations

‌

US Patent 10585363 Alignment system

Patent Citations Received

‌

US Patent 12111580 Optical metrology utilizing short-wave infrared wavelengths

Patent Primary Examiner

CPC Code

Disclosed is a metrology device (

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