US Patent 11306393 Methods and apparatus for ALD processes
Patent 11306393 was granted and assigned to Applied Materials on April, 2022 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 19, 2019
Date of Patent
April 19, 2022
Patent Applicant
Patent Application Number
16517255
Patent Inventor Names
Chien-Teh Kao
0
Jeffrey A. Kho
0
Jianhua Zhou
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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