US Patent 11186910 Apparatus for multi-flow precursor dosage
Patent 11186910 was granted and assigned to Applied Materials on November, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
September 12, 2019
Date of Patent
November 30, 2021
Patent Applicant
Patent Application Number
16568612
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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