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US Patent 11186910 Apparatus for multi-flow precursor dosage

Patent 11186910 was granted and assigned to Applied Materials on November, 2021 by the United States Patent and Trademark Office.

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edited on 12 Dec, 2023
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Patent abstract

Provided are gas distribution apparatus with a delivery channel having an inlet end, an outlet end and a plurality of apertures spaced along the length. The delivery channel is separated into a plurality of zones by partitions. Each of the plurality of zones has an inlet and an outlet.

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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=1118691000
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
111869100
Date of Patent
November 30, 2021
0
Patent Application Number
165686120
Date Filed
September 12, 2019
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=111869100
Patent Citations Received
‌
US Patent 11309167 Active gas generation apparatus and deposition processing apparatus
0
‌
US Patent 11306393 Methods and apparatus for ALD processes
0
‌
US Patent 11420217 Showerhead for ALD precursor delivery
0
Patent Primary Examiner
‌
Rudy Zervigon
0
Edits on 28 Mar, 2023
"update citations for inverse infoboxes"
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edited on 28 Mar, 2023
Edits on 25 Sep, 2022
"update citations for inverse infoboxes"
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edited on 25 Sep, 2022
"update citations for inverse infoboxes"
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edited on 24 Sep, 2022
Edits on 23 Sep, 2022
"Entity importer update"
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edited on 23 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
111869100
Date of Patent
November 30, 2021
0
Patent Application Number
165686120
Date Filed
September 12, 2019
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=111869100
Patent Citations Received
‌
US Patent 11309167 Active gas generation apparatus and deposition processing apparatus
0
‌
US Patent 11306393 Methods and apparatus for ALD processes
0
‌
US Patent 11420217 Showerhead for ALD precursor delivery
0
Patent Primary Examiner
‌
Rudy Zervigon
0
Edits on 24 Aug, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 24 Aug, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11420217 Showerhead for ALD precursor delivery
Edits on 15 Jun, 2022
"Entity importer update"
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Golden AI
edited on 15 Jun, 2022
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Infobox (+1 properties)
Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=11186910
Edits on 18 May, 2022
"update inverses"
Golden AI profile picture
Golden AI
edited on 18 May, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11306393 Methods and apparatus for ALD processes
"update inverses"
Golden AI profile picture
Golden AI
edited on 18 May, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent citations received
‌
US Patent 11309167 Active gas generation apparatus and deposition processing apparatus
Edits on 2 Dec, 2021
"Created via: Entity Importer"
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created this topic on 2 Dec, 2021
Edits made to:
Infobox (+9 properties)
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 US Patent 11186910 Apparatus for multi-flow precursor dosage

Infobox
Is a
Patent
Patent
Patent applicant
Applied Materials
Applied Materials
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
11186910
Date of patent
November 30, 2021
Patent application number
16568612
Date Filed
September 12, 2019
Patent primary examiner
‌
Rudy Zervigon

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