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US Patent 11101108 Nanosecond pulser ADC system

Patent 11101108 was granted and assigned to Eagle Harbor Technologies, Inc. on August, 2021 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
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Date Filed
April 14, 2020
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Date of Patent
August 24, 2021
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Patent Applicant
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
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Patent Application Number
20200414
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Patent Citations Received
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US Patent 12111341 In-situ electric field detection method and apparatus
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US Patent 11462389 Pulsed-voltage hardware assembly for use in a plasma processing system
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US Patent 11495470 Method of enhancing etching selectivity using a pulsed plasma
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US Patent 11508554 High voltage filter assembly
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US Patent 11569066 Pulsed voltage source for plasma processing applications
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US Patent 11284500 Method of controlling ion energy distribution using a pulse generator
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US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform
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US Patent 11776788 Pulsed voltage boost for substrate processing
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US Patent 11972924 Pulsed voltage source for plasma processing applications
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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
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•••
Patent Inventor Names
Timothy Ziemba
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Kevin Muggli
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TaiSheng Yeager
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Eric Hanson
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Huatsern Yeager
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Ilia Slobodov
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John Carscadden
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Kenneth Miller
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11101108
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