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US Patent 11101108 Nanosecond pulser ADC system

Patent 11101108 was granted and assigned to Eagle Harbor Technologies, Inc. on August, 2021 by the United States Patent and Trademark Office.

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Patent
Patent
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Patent attributes

Patent Applicant
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
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Current Assignee
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
111011080
Patent Inventor Names
Timothy Ziemba0
Kevin Muggli0
TaiSheng Yeager0
Eric Hanson0
Huatsern Yeager0
Ilia Slobodov0
John Carscadden0
Kenneth Miller0
Date of Patent
August 24, 2021
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Patent Application Number
202004140
Date Filed
April 14, 2020
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Patent Citations Received
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US Patent 12111341 In-situ electric field detection method and apparatus
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US Patent 11462389 Pulsed-voltage hardware assembly for use in a plasma processing system
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US Patent 11495470 Method of enhancing etching selectivity using a pulsed plasma
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US Patent 11508554 High voltage filter assembly
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US Patent 11569066 Pulsed voltage source for plasma processing applications
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US Patent 11284500 Method of controlling ion energy distribution using a pulse generator
0
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US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform
0
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US Patent 11776788 Pulsed voltage boost for substrate processing
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Patent abstract

A nanosecond pulser system is disclosed. In some embodiments, the nanosecond pulser system may include a nanosecond pulser having a nanosecond pulser input; a plurality of switches coupled with the nanosecond pulser input; one or more transformers coupled with the plurality of switches; and an output coupled with the one or more transformers and providing a high voltage waveform with a amplitude greater than 2 kV and a frequency greater than 1 kHz based on the nanosecond pulser input. The nanosecond pulser system may also include a control module coupled with the nanosecond pulser input; and an control system coupled with the nanosecond pulser at a point between the transformer and the output, the control system providing waveform data regarding an high voltage waveform produced at the point between the transformer and the output.

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