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US Patent 10662525 Thin film deposition apparatus

Overview Structured Data Issues Contributors Activity

Is a

Date Filed

July 5, 2016

Date of Patent

May 26, 2020

Patent Application Number

15202468

Patent Citations Received

US Patent 11286558 Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film

US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures

US Patent D947913 Susceptor shaft

US Patent 11450529 Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface

US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures

US Patent 11274369 Thin film deposition method

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Patent Primary Examiner

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