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US Patent 10585363 Alignment system
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Is a
Patent
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Date Filed
March 14, 2016
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Date of Patent
March 10, 2020
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Patent Application Number
15575069
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Patent Citations Received
US Patent 11360399 Metrology sensor for position metrology
US Patent 11803130 Phase modulators in alignment to decrease mark size
Patent Inventor Names
Arie Jeffrey Den Boef
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Adrianus Johannes Hendrikus Schellekens
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Alessandro Polo
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Simon Gijsbert Josephus Mathijssen
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Simon Reinald Huisman
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Willem Marie Julia Marcel Coene
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Elahe Yeganegi Dastgerdi
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Erik Willem Bogaart
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Patricius Aloysius Jacobus Tinnemans
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10585363
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Patent Primary Examiner
Mesfin T Asfaw
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