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US Patent 10354873 Organic mandrel protection process

Patent 10354873 was granted and assigned to Tokyo Electron on July, 2019 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Current Assignee
Tokyo Electron
Tokyo Electron
Date Filed
April 19, 2017
Date of Patent
July 16, 2019
Patent Application Number
15491432
Patent Citations Received
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US Patent D947913 Susceptor shaft
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US Patent 11286562 Gas-phase chemical reactor and method of using same
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US Patent 11286558 Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
0
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US Patent 11289326 Method for reforming amorphous carbon polymer film
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US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
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US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
0
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US Patent 11682558 Fabrication of back-end-of-line interconnects
0
‌
US Patent 11346882 Enhancement of yield of functional microelectronic devices
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US Patent 11435393 Enhancement of yield of functional microelectronic devices
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US Patent 11242598 Structures including metal carbide material, devices including the structures, and methods of forming same
•••
Patent Inventor Names
Angelique Raley
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Satoru Nakamura
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Sophie Thibaut
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Akiteru Ko
0
Nihar Mohanty
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10354873
Patent Primary Examiner
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Mohammad R Alam

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