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US Patent 10343920 Aligned carbon nanotubes
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Patent
Date Filed
March 18, 2016
Date of Patent
July 9, 2019
Patent Application Number
15074813
Patent Citations
US Patent 10032792 Semiconductor device and manufacturing method thereof
US Patent 10043661 Method for protecting layer by forming hydrocarbon-based extremely thin film
US Patent 10083836 Formation of boron-doped titanium metal films with high work function
US Patent 10087522 Deposition of metal borides
US Patent 10090316 3D stacked multilayer semiconductor memory using doped select transistor channel
US Patent 10087525 Variable gap hard stop design
US Patent 10103040 Apparatus and method for manufacturing a semiconductor device
US Patent 10032628 Source/drain performance through conformal solid state doping
US Patent 10023960 Process gas management for an inductively-coupled plasma deposition reactor
Patent Citations Received
US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
US Patent 11289326 Method for reforming amorphous carbon polymer film
US Patent D947913 Susceptor shaft
US Patent 11295980 Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
US Patent 10559458 Method of forming oxynitride film
US Patent 10561975 Variable conductance gas distribution apparatus and method
US Patent D876504 Exhaust flow control ring for semiconductor deposition apparatus
US Patent 10590535 Chemical treatment, deposition and/or infiltration apparatus and method for using the same
US Patent 10600673 Magnetic susceptor to baseplate seal
US Patent 10604847 Gas distribution system, reactor including the system, and methods of using the same
•••
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10343920
Patent Primary Examiner
Gerard Higgins
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