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US Patent 10322384 Counter flow mixer for process chamber

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Patent abstract

A counterflow mixing device for a process chamber is disclosed, comprising an injection tube that introduces a fluid in a manner counter to a flow of a post-plasma gas mixture traveling downward from a plasma source. The invention allows for proper mixing of the fluid as well as avoiding recombination of generated ions and radicals.

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Patent Inventor Names
Chris Wuester0
John F. Stumpf0
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=10322384
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Patent Citations Received
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US Patent D947913 Susceptor shaft
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Patent Citations Received
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US Patent 10851456 Deposition of metal borides
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Patent Citations Received
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US Patent 11274369 Thin film deposition method
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