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US Patent 10211308 NbMC layers

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Edits on 8 Dec, 2023

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Patent abstract

Methods of forming thin-film structures including one or more NbMC layers, and structures and devices including the one or more NbMC layers are disclosed. The NbMC layers enable tuning of various structure and device properties, including resistivity, current leakage, and work function.

Edits on 2 Oct, 2023

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Patent Inventor Names

Chiyu Zhu0

Robert Brennan Milligan0

Timo Asikainen0

Edits on 30 Apr, 2023

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edited on 30 Apr, 2023

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Patent Citations Received

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US Patent 10910262 Method of selectively depositing a capping layer structure on a semiconductor device structure

Edits on 30 Apr, 2023

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edited on 30 Apr, 2023

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US Patent 10797133 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures

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edited on 29 Apr, 2023

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US Patent 10655221 Method for depositing oxide film by thermal ALD and PEALD

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edited on 29 Apr, 2023

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US Patent D947913 Susceptor shaft

Edits on 28 Apr, 2023

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US Patent 10804098 Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species

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edited on 28 Apr, 2023

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US Patent 11004977 Method for depositing a group IV semiconductor and related semiconductor device structures

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US Patent 10844486 Semiconductor processing reactor and components thereof

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edited on 28 Apr, 2023

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US Patent 10707106 High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules

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edited on 28 Apr, 2023

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Patent Citations Received

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US Patent 11296189 Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures

Edits on 27 Apr, 2023

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edited on 27 Apr, 2023

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Patent Citations Received

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US Patent 10731249 Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus

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edited on 27 Apr, 2023

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US Patent 11056567 Method of forming a doped metal carbide film on a substrate and related semiconductor device structures

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edited on 27 Apr, 2023

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US Patent D900036 Heater electrical connector and adapter

Edits on 26 Apr, 2023

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edited on 26 Apr, 2023

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US Patent 10851456 Deposition of metal borides

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edited on 26 Apr, 2023

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US Patent 10770336 Substrate lift mechanism and reactor including same

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edited on 26 Apr, 2023

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US Patent 11232963 Substrate processing apparatus and method

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edited on 26 Apr, 2023

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US Patent 10612136 Temperature-controlled flange and reactor system including same

Edits on 25 Apr, 2023

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edited on 25 Apr, 2023

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US Patent 11274369 Thin film deposition method

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edited on 25 Apr, 2023

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US Patent 10811256 Method for etching a carbon-containing feature

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