List of Rudolph Technologies, Inc. patents

Patents where

Current Assignee

Name

‌

Rudolph Technologies, Inc.

Name	Description	Patent Applicant	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7616328 Method and system for providing a high definition triangulation system	Patent 7616328 was granted and assigned to Rudolph Technologies, Inc. on November, 2009 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7616328	November 10, 2009
‌ US Patent 7050178 Method and apparatus for increasing signal to noise ratio in a photoacoustic film thickness measurement system	Patent 7050178 was granted and assigned to Rudolph Technologies, Inc. on May, 2006 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7050178	May 23, 2006
‌ US Patent 7703823 Wafer holding mechanism	Patent 7703823 was granted and assigned to Rudolph Technologies, Inc. on April, 2010 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7703823	April 27, 2010
‌ US Patent 8380472 Semiconductor yield management system and method	Patent 8380472 was granted and assigned to Rudolph Technologies, Inc. on February, 2013 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	8380472	February 19, 2013
‌ US Patent 7634128 Stereoscopic three-dimensional metrology system and method	Patent 7634128 was granted and assigned to Rudolph Technologies, Inc. on December, 2009 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7634128	December 15, 2009
‌ US Patent 7522272 Metrology system with spectroscopic ellipsometer and photoacoustic measurements	Patent 7522272 was granted and assigned to Rudolph Technologies, Inc. on April, 2009 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7522272	April 21, 2009
‌ US Patent 8428393 System and method of non-linear grid fitting and coordinate system mapping	Patent 8428393 was granted and assigned to Rudolph Technologies, Inc. on April, 2013 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	8428393	April 23, 2013
‌ US Patent 7729528 Automated wafer defect inspection system and a process of performing such inspection	Patent 7729528 was granted and assigned to Rudolph Technologies, Inc. on June, 2010 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7729528	June 1, 2010
‌ US Patent 7634129 Dual-axis scanning system and method	Patent 7634129 was granted and assigned to Rudolph Technologies, Inc. on December, 2009 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7634129	December 15, 2009
‌ US Patent 7616804 Wafer edge inspection and metrology	Patent 7616804 was granted and assigned to Rudolph Technologies, Inc. on November, 2009 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7616804	November 10, 2009
‌ US Patent 7461961 Fiber optic darkfield ring light	Patent 7461961 was granted and assigned to Rudolph Technologies, Inc. on December, 2008 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7461961	December 9, 2008
‌ US Patent 7633306 System and method of measuring probe float	Patent 7633306 was granted and assigned to Rudolph Technologies, Inc. on December, 2009 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7633306	December 15, 2009
‌ US Patent 8139232 Multiple measurement techniques including focused beam scatterometry for characterization of samples	Patent 8139232 was granted and assigned to Rudolph Technologies, Inc. on March, 2012 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	8139232	March 20, 2012
‌ US Patent 7385409 System and method of mitigating effects of component deflection in a probe card analyzer	Patent 7385409 was granted and assigned to Rudolph Technologies, Inc. on June, 2008 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7385409	June 10, 2008
‌ US Patent 9437467 Substrate handler	Patent 9437467 was granted and assigned to Rudolph Technologies, Inc. on September, 2016 by the United States Patent and Trademark Office.	‌ Rudolph Technologies, Inc.	‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	9437467	September 6, 2016
‌ US Patent 8698327 Substrate handler	Patent 8698327 was granted and assigned to Rudolph Technologies, Inc. on April, 2014 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	8698327	April 15, 2014
‌ US Patent 7593565 All surface data for use in substrate inspection	Patent 7593565 was granted and assigned to Rudolph Technologies, Inc. on September, 2009 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7593565	September 22, 2009
‌ US Patent 9062859 Wafer edge inspection illumination system	Patent 9062859 was granted and assigned to Rudolph Technologies, Inc. on June, 2015 by the United States Patent and Trademark Office.	‌ Rudolph Technologies, Inc.	‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	9062859	June 23, 2015
‌ US Patent 7903238 Combination of ellipsometry and optical stress generation and detection	Patent 7903238 was granted and assigned to Rudolph Technologies, Inc. on March, 2011 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7903238	March 8, 2011
‌ US Patent 9625832 Planar motor system with increased efficiency	Patent 9625832 was granted and assigned to Rudolph Technologies, Inc. on April, 2017 by the United States Patent and Trademark Office.	‌ Rudolph Technologies, Inc.	‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	9625832	April 18, 2017
‌ US Patent 8699027 Multiple measurement techniques including focused beam scatterometry for characterization of samples	Patent 8699027 was granted and assigned to Rudolph Technologies, Inc. on April, 2014 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	8699027	April 15, 2014
‌ US Patent 7835566 All surface data for use in substrate inspection	Patent 7835566 was granted and assigned to Rudolph Technologies, Inc. on November, 2010 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7835566	November 16, 2010
‌ US Patent 7705974 Metrology system with spectroscopic ellipsometer and photoacoustic measurements	Patent 7705974 was granted and assigned to Rudolph Technologies, Inc. on April, 2010 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	7705974	April 27, 2010
‌ US Patent 8130372 Wafer holding mechanism	Patent 8130372 was granted and assigned to Rudolph Technologies, Inc. on March, 2012 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	8130372	March 6, 2012
‌ US Patent 8466703 Probe card analysis system and method	Patent 8466703 was granted and assigned to Rudolph Technologies, Inc. on June, 2013 by the United States Patent and Trademark Office.		‌ Rudolph Technologies, Inc.	United States Patent and Trademark Office	8466703	June 18, 2013

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