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US Patent 8380472 Semiconductor yield management system and method

Patent 8380472 was granted and assigned to Rudolph Technologies, Inc. on February, 2013 by the United States Patent and Trademark Office.

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Current Assignee
‌
Rudolph Technologies, Inc.
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
8380472
Patent Inventor Names
Jonathan B. Buckheit0
Weidong Wang0
Date of Patent
February 19, 2013
Patent Application Number
12150676
Date Filed
April 29, 2008
Patent Citations Received
0
Patent Primary Examiner
‌
Saif Alhija
Patent abstract

A system and method for yield management are disclosed wherein a data set containing one or more prediction variable values and one or more response variable values is input into the system. The system can process the input data set to remove prediction variables with missing values and data sets with missing values based on a tiered splitting method to maximize usage of all valid data points. The processed data can then be used to generate a model that may be a decision tree. The system can accept user input to modify the generated model. Once the model is complete, one or more statistical analysis tools can be used to analyze the data and generate a list of the key yield factors for the particular data set.

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