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List of FSI International patents

Patents where

Current Assignee

Name

‌

FSI International

Name	Description	Current Assignee	Patent Jurisdiction	Patent Number	Date of Patent
‌ US Patent 7592264 Process for removing material from substrates	Patent 7592264 was granted and assigned to FSI International on September, 2009 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7592264	September 22, 2009
‌ US Patent 6996456 Robot with tactile sensor device	Patent 6996456 was granted and assigned to FSI International on February, 2006 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	6996456	February 7, 2006
‌ US Patent 7422031 Rotary unions, fluid delivery systems, and related methods	Patent 7422031 was granted and assigned to FSI International on September, 2008 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7422031	September 9, 2008
‌ US Patent 7425505 Use of silyating agents	Patent 7425505 was granted and assigned to FSI International on September, 2008 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7425505	September 16, 2008
‌ US Patent 7476616 Reagent activator for electroless plating	Patent 7476616 was granted and assigned to FSI International on January, 2009 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7476616	January 13, 2009
‌ US Patent 7156927 Transition flow treatment process and apparatus	Patent 7156927 was granted and assigned to FSI International on January, 2007 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7156927	January 2, 2007
‌ US Patent 7364625 Rinsing processes and equipment	Patent 7364625 was granted and assigned to FSI International on April, 2008 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7364625	April 29, 2008
‌ US Patent 7238239 Liquid coating device with barometric pressure compensation	Patent 7238239 was granted and assigned to FSI International on July, 2007 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7238239	July 3, 2007
‌ US Patent 7089076 Scheduling multi-robot processing systems	Patent 7089076 was granted and assigned to FSI International on August, 2006 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7089076	August 8, 2006
‌ US Patent 7913706 Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses	Patent 7913706 was granted and assigned to FSI International on March, 2011 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7913706	March 29, 2011
‌ US Patent 7681581 Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids	Patent 7681581 was granted and assigned to FSI International on March, 2010 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7681581	March 23, 2010
‌ US Patent 8142571 Process for treatment of semiconductor wafer using water vapor containing environment	Patent 8142571 was granted and assigned to FSI International on March, 2012 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	8142571	March 27, 2012
‌ US Patent 7312161 Advanced process control for low variation treatment in immersion processing	Patent 7312161 was granted and assigned to FSI International on December, 2007 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7312161	December 25, 2007
‌ US Patent 7556697 System and method for carrying out liquid and subsequent drying treatments on one or more wafers	Patent 7556697 was granted and assigned to FSI International on July, 2009 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7556697	July 7, 2009
‌ US Patent 7819984 Process for treatment of substrates with water vapor or steam	Patent 7819984 was granted and assigned to FSI International on October, 2010 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7819984	October 26, 2010
‌ US Patent 8235068 Substrate processing systems and related methods	Patent 8235068 was granted and assigned to FSI International on August, 2012 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	8235068	August 7, 2012
‌ US Patent 7244315 Microelectronic device drying devices and techniques	Patent 7244315 was granted and assigned to FSI International on July, 2007 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7244315	July 17, 2007
‌ US Patent 7134827 Reduced footprint tool for automated processing of microelectronic substrates	Patent 7134827 was granted and assigned to FSI International on November, 2006 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7134827	November 14, 2006
‌ US Patent 7235495 Controlled growth of highly uniform, oxide layers, especially ultrathin layers	Patent 7235495 was granted and assigned to FSI International on June, 2007 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7235495	June 26, 2007
‌ US Patent 7404681 Coating methods and apparatus for coating	Patent 7404681 was granted and assigned to FSI International on July, 2008 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	7404681	July 29, 2008
‌ US Patent 8235062 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation	Patent 8235062 was granted and assigned to FSI International on August, 2012 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	8235062	August 7, 2012
‌ US Patent 8104425 Reagent activator for electroless plating	Patent 8104425 was granted and assigned to FSI International on January, 2012 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	8104425	January 31, 2012
‌ US Patent 8070884 Methods for rinsing microelectronic substrates utilizing cool rinse fluid within a gas enviroment including a drying enhancement substance	Patent 8070884 was granted and assigned to FSI International on December, 2011 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	8070884	December 6, 2011
‌ US Patent 6845779 Edge gripping device for handling a set of semiconductor wafers in an immersion processing system	Patent 6845779 was granted and assigned to FSI International on January, 2005 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	6845779	January 25, 2005
‌ US Patent 6979165 Reduced footprint tool for automated processing of microelectronic substrates	Patent 6979165 was granted and assigned to FSI International on December, 2005 by the United States Patent and Trademark Office.	‌ FSI International	United States Patent and Trademark Office	6979165	December 27, 2005

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