US Patent 8235068 Substrate processing systems and related methods

Patent 8235068 was granted and assigned to FSI International on August, 2012 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

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FSI International

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

8235068

Patent Inventor Names

Kurt K. Christenson0

Date of Patent

August 7, 2012

Patent Application Number

12387314

Date Filed

April 30, 2009

Patent Primary Examiner

Kevin Lee

Patent abstract

A system for processing one or more substrates according to the present invention includes a diversion valve that can deliver two or more process fluids to a dispensing device through a common line/pipe. The present invention also includes related methods.