Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sean D. Simondet0
David C. Zimmerman0
Quirin W. Matthys0
Robert E. Larson0
Todd K. Maciej0
Date of Patent
December 27, 2005
0Patent Application Number
102921470
Date Filed
November 12, 2002
0Patent Primary Examiner
Patent abstract
The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
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