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List of Brooks Automation patents

List of Brooks Automation patents
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Patents where
Current Assignee
Name
is
Brooks AutomationBrooks Automation
Name
Description
Patent Applicant
Current Assignee
Inventor
Patent Jurisdiction
Patent Number
Date of Patent
‌
US Patent 10156386 System and method for cryogenic cooling

Patent 10156386 was granted and assigned to Brooks Automation on December, 2018 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
10156386
December 18, 2018
‌
US Patent 10120374 Intelligent condition monitoring and fault diagnostic system for preventative maintenance

Patent 10120374 was granted and assigned to Brooks Automation on November, 2018 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
10120374
November 6, 2018
‌
US Patent 6986636 Device for positioning disk-shaped objects

Patent 6986636 was granted and assigned to Brooks Automation on January, 2006 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
6986636
January 17, 2006
‌
US Patent 11476139 Substrate process apparatus

Patent 11476139 was granted and assigned to Brooks Automation on October, 2022 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
11476139
October 18, 2022
‌
US Patent 11404939 Position feedback for sealed environments

Patent 11404939 was granted and assigned to Brooks Automation on August, 2022 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
11404939
August 2, 2022
‌
US Patent 7607879 Substrate processing apparatus with removable component module

Patent 7607879 was granted and assigned to Brooks Automation on October, 2009 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7607879
October 27, 2009
‌
US Patent 7194332 Data based node penalties

Patent 7194332 was granted and assigned to Brooks Automation on March, 2007 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7194332
March 20, 2007
‌
US Patent 7413411 Electronically controlled vacuum pump

Patent 7413411 was granted and assigned to Brooks Automation on August, 2008 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7413411
August 19, 2008
‌
US Patent 7988398 Linear substrate transport apparatus

Patent 7988398 was granted and assigned to Brooks Automation on August, 2011 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7988398
August 2, 2011
‌
US Patent 7959395 Substrate processing apparatus

Patent 7959395 was granted and assigned to Brooks Automation on June, 2011 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7959395
June 14, 2011
‌
US Patent 10978330 On the fly automatic wafer centering method and apparatus

Patent 10978330 was granted and assigned to Brooks Automation on April, 2021 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
10978330
April 13, 2021
‌
US Patent 7127901 Helium management control system

Patent 7127901 was granted and assigned to Brooks Automation on October, 2006 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7127901
October 31, 2006
‌
US Patent 10923375 Load port module

Patent 10923375 was granted and assigned to Brooks Automation on February, 2021 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
10923375
February 16, 2021
‌
US Patent 7103428 Remote display module

Patent 7103428 was granted and assigned to Brooks Automation on September, 2006 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7103428
September 5, 2006
‌
US Patent 8662812 Load lock fast pump vent

Patent 8662812 was granted and assigned to Brooks Automation on March, 2014 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
8662812
March 4, 2014
‌
US Patent 11276598 Substrate transport apparatus

Patent 11276598 was granted and assigned to Brooks Automation on March, 2022 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
11276598
March 15, 2022
‌
US Patent 11610793 Load port module

Patent 11610793 was granted and assigned to Brooks Automation on March, 2023 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
11610793
March 21, 2023
‌
US Patent 9723832 Modular sample store

Patent 9723832 was granted and assigned to Brooks Automation on August, 2017 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
9723832
August 8, 2017
‌
US Patent 8651789 Substrate processing apparatus

Patent 8651789 was granted and assigned to Brooks Automation on February, 2014 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
8651789
February 18, 2014
‌
US Patent 11476142 Load port module

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
11476142
October 18, 2022
‌
US Patent 7179044 Method of removing substrates from a storage site and a multiple substrate batch loader

Patent 7179044 was granted and assigned to Brooks Automation on February, 2007 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7179044
February 20, 2007
‌
US Patent 10325795 Substrate processing apparatus

Patent 10325795 was granted and assigned to Brooks Automation on June, 2019 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
10325795
June 18, 2019
‌
US Patent 7456634 Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments

Patent 7456634 was granted and assigned to Brooks Automation on November, 2008 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7456634
November 25, 2008
‌
US Patent 9570330 Substrate processing apparatus

Patent 9570330 was granted and assigned to Brooks Automation on February, 2017 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
9570330
February 14, 2017
‌
US Patent 7360429 High sensitivity pressure actuated switch based on MEMS-fabricated silicon diaphragm and having electrically adjustable switch point

Patent 7360429 was granted and assigned to Brooks Automation on April, 2008 by the United States Patent and Trademark Office.

Brooks Automation
Brooks Automation
United States Patent and Trademark Office
United States Patent and Trademark Office
7360429
April 22, 2008
...
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