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US Patent 11476139 Substrate process apparatus

Patent 11476139 was granted and assigned to Brooks Automation on October, 2022 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Brooks Automation
Brooks Automation
Current Assignee
Brooks Automation
Brooks Automation
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11476139
Date of Patent
October 18, 2022
Patent Application Number
17180298
Date Filed
February 19, 2021
Patent Citations
‌
US Patent 10348178 Methods and systems for controllably moving multiple moveable stages in a displacement device
‌
US Patent 10554110 Displacement devices and methods for fabrication, use and control of same
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US Patent 10636687 Apparatus for transportation of a substrate carrier in a vacuum chamber, system for vacuum processing of a substrate, and method for transportation of a substrate carrier in a vacuum chamber
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US Patent 10704927 Displacement devices and methods and apparatus for detecting and estimating motion associated with same
‌
US Patent 10707738 Displacement devices, moveable stages for displacement devices and methods for fabrication, use and control of same
‌
US Patent 10763733 Methods and systems for controllably moving one or more moveable stages in a displacement device
‌
US Patent 10819205 Methods and systems for controllably moving multiple moveable stages in a displacement device
‌
US Patent 10926418 Robotic devices and methods for fabrication, use and control of same
...
Patent Citations Received
‌
US Patent 11776834 On the fly automatic wafer centering method and apparatus
‌
US Patent 11764092 Substrate transfer apparatus and substrate processing system
Patent Primary Examiner
‌
James R Bidwell
CPC Code
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H01L 21/67709
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B65G 35/06
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B65G 54/02
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H02K 41/025
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H02N 15/00
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H02K 2201/18
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G05D 3/125

A linear electrical machine comprising a frame with a level reference plane and an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the reference plane. The array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet. At least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along at least one drive line, in a controlled attitude relative to the drive plane.

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