US Patent D922609 Holding pad for substrate transfer
Patent D922609 was granted and assigned to Tokyo Electron on June, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 8, 2018
0
Date of Patent
June 15, 2021
0
Patent Applicant
Patent Application Number
29665836
0
Patent Inventor Names
Akihiro Teramoto
0
Toru Tokimatu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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