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US Patent D1012311 Holding pad for carrying substrate

Patent D1012311 was granted and assigned to Tokyo Electron on January, 2024 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Tokyo Electron

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D10123110

Patent Inventor Names

Suguru Enokida0

Tatsuhiko Tsujihashi0

Kazuki Matsushita0

Date of Patent

January 23, 2024

Patent Application Number

298210060

Date Filed

December 27, 2021

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