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US Patent D909603 Holding pad for substrate transfer

Patent D909603 was granted and assigned to Tokyo Electron on February, 2021 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Patent Applicant

Tokyo Electron

Current Assignee

Tokyo Electron

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D9096030

Patent Inventor Names

Akihiro Teramoto0

Toru Tokimatu0

Date of Patent

February 2, 2021

Patent Application Number

296658370

Date Filed

October 8, 2018

Patent Citations Received

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US Patent D1012311 Holding pad for carrying substrate

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US Patent D1011550 Holding pad for carrying substrate

Patent Primary Examiner

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Susan Bennett Hattan

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