US Patent D812578 Upper chamber for a plasma processing apparatus
Patent D812578 was granted and assigned to Hitachi on March, 2018 by the United States Patent and Trademark Office.
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Patent Citations Received
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Patent Inventor Names
Kohei Sato0
Susumu Tauchi0
Takashi Uemura0
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US Patent D0812578 Upper chamber for a plasma processing apparatus US Patent D812578 Upper chamber for a plasma processing apparatus
Infobox
Patent Number
D081257800
Patent Number
D81257800
Edits on 21 Apr, 2023
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
D08125780
Date of Patent
March 13, 2018
0Patent Application Number
295721690
Date Filed
July 26, 2016
0Patent Primary Examiner
Edits on 26 Sep, 2022
Golden AI
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
D08125780
Date of Patent
March 13, 2018
0Patent Application Number
295721690
Date Filed
July 26, 2016
0Patent Primary Examiner
Edits on 19 Jan, 2022
Golden AI
Edits made to:
Infobox (+9 properties)
US Patent D0812578 Upper chamber for a plasma processing apparatus
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
D0812578
Date of patent
March 13, 2018
Patent application number
29572169
Date Filed
July 26, 2016
Patent primary examiner
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