US Patent D812578 Upper chamber for a plasma processing apparatus

Patent D812578 was granted and assigned to Hitachi on March, 2018 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Hitachi

Current Assignee

Hitachi

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D812578

Patent Inventor Names

Kohei Sato0

Susumu Tauchi0

Takashi Uemura0

Date of Patent

March 13, 2018

Patent Application Number

29572169

Date Filed

July 26, 2016

Patent Citations Received

‌

US Patent D1008967 Collar for connector

Patent Primary Examiner

Jeffrey D. Asch

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