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US Patent D793976 Substrate retaining ring

Overview Structured Data Issues Contributors Activity

Is a

Patent

Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

D793976

Patent Inventor Names

Keisuke Namiki0

Hozumi Yasuda0

Makoto Fukushima0

Osamu Nabeya0

Satoru Yamaki0

Shingo Togashi0

Date of Patent

August 8, 2017

Patent Application Number

29573831

Date Filed

August 10, 2016

Patent Citations Received

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US Patent D989012 Elastic membrane

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US Patent D1049067 Ring for an anti-rotation process kit for a substrate processing chamber

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US Patent D1021832 Elastic membrane

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US Patent D1006768 Semiconductor wafer for mosaic solar cell fabrication

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US Patent D1040304 Deposition ring for physical vapor deposition chamber

Patent Primary Examiner

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Elizabeth J Oswecki

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