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US Patent D766849 Substrate retaining ring

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Is a
Patent
Patent
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Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
D7668490
Patent Inventor Names
Hozumi Yasuda0
Osamu Nabeya0
Satoru Yamaki0
Shingo Togashi0
Keisuke Namiki0
Makoto Fukushima0
Date of Patent
September 20, 2016
0
Patent Application Number
294723500
Date Filed
November 12, 2013
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Patent Citations Received
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US Patent D998575 Collimator for use in a physical vapor deposition (PVD) chamber
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US Patent D1040304 Deposition ring for physical vapor deposition chamber
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US Patent D1013841 Retaining ring
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Patent Primary Examiner
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Elizabeth J Oswecki
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