US Patent 9965848 Shape based grouping
Patent 9965848 was granted and assigned to KLA-Tencor on May, 2018 by the United States Patent and Trademark Office.
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Patent abstract
Shape primitives are used for inspection of a semiconductor wafer or other workpiece. The shape primitives can define local topological and geometric properties of a design. One or more rules are applied to the shape primitives. The rules can indicate presence of a defect or the likelihood of a defect being present. A rule execution engine can search for an occurrence of the shape primitives covered by the at least one rule.
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Patent Inventor Names
Ashok Kulkarni0
Jagdish Saraswatula0
Saibal Banerjee0
Santosh Bhattacharyya0
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US Patent 09965848 Shape based grouping US Patent 9965848 Shape based grouping
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Patent Number
099658480
Patent Number
99658480
Edits on 25 Apr, 2023
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
099658480
Date of Patent
May 8, 2018
0Patent Application Number
153556060
Date Filed
November 18, 2016
0Patent Primary Examiner
Edits on 20 Jan, 2022
Golden AI
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Infobox (+9 properties)
US Patent 09965848 Shape based grouping
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
09965848
Date of patent
May 8, 2018
Patent application number
15355606
Date Filed
November 18, 2016
Patent primary examiner
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