Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jagdish Saraswatula0
Santosh Bhattacharyya0
Ashok Kulkarni0
Saibal Banerjee0
Date of Patent
May 8, 2018
0Patent Application Number
153556060
Date Filed
November 18, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Shape primitives are used for inspection of a semiconductor wafer or other workpiece. The shape primitives can define local topological and geometric properties of a design. One or more rules are applied to the shape primitives. The rules can indicate presence of a defect or the likelihood of a defect being present. A rule execution engine can search for an occurrence of the shape primitives covered by the at least one rule.
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