Patent attributes
An optical microscope capable of performing measurement with a high resolution and a spectrometry method are provided. A spectrometry device according to an aspect of the present invention includes a Y-scanning unit that scans a spot position of the light beam on the sample, a beam splitter that separates, among the light beam incident on the sample, outgoing light, the outgoing light being emitted with a different wavelength, a spectroscope that spatially disperses the outgoing light separated by the beam splitter according to the wavelength, a detector that detects the outgoing light dispersed by the spectroscope, and a pinhole array 30 disposed on an incoming side of the spectroscope, a plurality of pinholes being arranged in the pinhole array, the plurality of pinholes being adapted to allow outgoing light to pass therethrough to the spectroscope side.
