US Patent 11837839 Optical pulse stretcher, laser device, and electronic device manufacturing method

An optical pulse stretcher includes a first delay optical system including a plurality of concave toroidal mirrors; and a beam splitter including a first surface and a second surface, causing a part of pulse laser light incident on the first surface to be transmitted in a first direction and output as a first beam and another part thereof to be reflected in a second direction and enter the first delay optical system, and causing a part of pulse laser light incident on the second surface from the first delay optical system to be reflected in the first direction and output as a second beam.