US Patent 9837285 Etching method
Patent 9837285 was granted and assigned to Tokyo Electron on December, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 30, 2015
Date of Patent
December 5, 2017
Patent Applicant
Patent Application Number
14813353
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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