US Patent 9777793 Six-degree-of-freedom micro vibration suppression platform and control method thereof

A six-degree-of-freedom micro vibration suppression platform includes a basic platform, a load platform, six sets of single-degree-of-freedom active and passive composite vibration isolation devices that are exactly the same and a controller. Upper and lower ends of each set of single-degree-of-freedom active and passive composite vibration isolation devices are connected with the load platform and the basic platform, respectively. A control method includes: calculating a logical axis signal, calculating a logical axis control signal, calculating physical axis real-time control signals and a transfer step.