Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jozef Thomas Martinus van Beek0
Martijn Goossens0
Olaf Wunnicke0
Peter Gerard Steeneken0
Willem Frederik Adrianus Besling0
Date of Patent
September 26, 2017
0Patent Application Number
137868180
Date Filed
March 6, 2013
0Patent Citations Received
...
Patent Primary Examiner
Patent abstract
A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.
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