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US Patent 9772245 MEMS capacitive pressure sensor

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US Patent 12108785 Vaporizer device body
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US Patent 12102117 Vaporizer device with differential pressure sensor
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US Patent 12063973 Vaporization device control systems and methods
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US Patent 11992044 Vaporization device systems and methods
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US Patent 11946817 Integrated digital force sensors and related methods of manufacture
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US Patent 11874185 Force attenuator for force sensor
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Patent abstract

A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.

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Patent Inventor Names
Jozef Thomas Martinus van Beek0
Martijn Goossens0
Olaf Wunnicke0
Peter Gerard Steeneken0
Willem Frederik Adrianus Besling0
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US Patent 11751605 Securely attaching cartridges for vaporizer devices
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US Patent 11754451 Integrated piezoresistive and piezoelectric fusion force sensor
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US Patent 11747950 Force determination based on capacitive sensing
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US Patent 09772245 MEMS capacitive pressure sensor US Patent 9772245 MEMS capacitive pressure sensor

Infobox
Patent Number
097722450
Patent Number
97722450
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
097722450
Date of Patent
September 26, 2017
0
Patent Application Number
137868180
Date Filed
March 6, 2013
0
Patent Primary Examiner
‌
R. A. Smith
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 US Patent 09772245 MEMS capacitive pressure sensor

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09772245
Date of patent
September 26, 2017
Patent application number
13786818
Date Filed
March 6, 2013
Patent primary examiner
‌
R. A. Smith

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