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US Patent 9751209 Compact direct drive spindle

Patent 9751209 was granted and assigned to Brooks Automation on September, 2017 by the United States Patent and Trademark Office.

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Is a
Patent
Patent
0

Patent attributes

Patent Applicant
Brooks Automation
Brooks Automation
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Current Assignee
Brooks Automation
Brooks Automation
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
97512090
Patent Inventor Names
Robert T. Caveney0
Date of Patent
September 5, 2017
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Patent Application Number
149418880
Date Filed
November 16, 2015
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Patent Citations Received
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US Patent 11978651 Substrate transport apparatus
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US Patent 11772261 Compact direct drive spindle
Patent Primary Examiner
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Bentsu Ro
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Patent abstract

A substrate transport apparatus including a frame, at least one arm link rotatably connected to the frame and a shaftless drive section. The shaftless drive section including stacked drive motors for rotating the at least one arm link relative to the frame through a shaftless interface, each of the stacked drive motors including a stator having stator coils disposed on a fixed post fixed relative to the frame and a rotor substantially peripherally surrounding the stator such that the rotor is connected to a respective one of the at least one arm link for rotating the one of the at least one arm link relative to the frame causing an extension or retraction of the one of the at least one arm link, where the stacked drive motors are disposed in the at least one arm link so that part of each stator is within a common arm link.

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