Log in
Enquire now
‌

US Patent 11978651 Substrate transport apparatus

OverviewStructured DataIssuesContributors

Contents

Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
119786510
Patent Inventor Names
Robert T. Caveney0
Date of Patent
May 7, 2024
0
Patent Application Number
176548520
Date Filed
March 15, 2022
0
Patent Citations
‌
US Patent 10748799 Substrate transport apparatus with interchangeable motor modules
0
‌
US Patent 11276598 Substrate transport apparatus
0
‌
US Patent 7736118 Transfer apparatus
0
‌
US Patent 8008884 Substrate processing apparatus with motors integral to chamber walls
0
‌
US Patent 9742250 Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods
0
‌
US Patent 9751209 Compact direct drive spindle
0
‌
US Patent 9948155 Sealed robot drive
0
‌
US Patent 10468936 Sealed robot drive
0
...
Patent Primary Examiner
‌
Gerald McClain
0
CPC Code
‌
B25J 9/042
0
Patent abstract

A transport apparatus including a drive section connected to a frame and including a multi-drive shaft spindle, with at least one coaxial shaft spindle, more than one different interchangeable motor module arranged in a stack, each having a motor operably coupled thereto and defining a corresponding independent drive axis, and a can seal disposed between the stator and rotor of each motor module and hermetically sealing the stator and rotor from each other, at least one of the motor modules is selectable for placement in the stack from other different interchangeable motor modules, each having a different predetermined characteristic, independent of placement in the stack, that defines a different predetermined drive characteristic of the corresponding drive axis, independent of shaft spindle location, so that selection of the at least one motor module determines the different predetermined drive characteristic of the corresponding axis different from another of the independent drive axis.

Timeline

No Timeline data yet.

Further Resources

Title
Author
Link
Type
Date
No Further Resources data yet.

References

Find more entities like US Patent 11978651 Substrate transport apparatus

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo

Company

  • Home
  • Press & Media
  • Blog
  • Careers
  • WE'RE HIRING

Products

  • Knowledge Graph
  • Query Tool
  • Data Requests
  • Knowledge Storage
  • API
  • Pricing
  • Enterprise
  • ChatGPT Plugin

Legal

  • Terms of Service
  • Enterprise Terms of Service
  • Privacy Policy

Help

  • Help center
  • API Documentation
  • Contact Us
By using this site, you agree to our Terms of Service.