US Patent 9711330 RF multi-feed structure to improve plasma uniformity
Patent 9711330 was granted and assigned to Applied Materials on July, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 10, 2016
Date of Patent
July 18, 2017
Patent Applicant
Patent Application Number
15150968
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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