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US Patent 9711330 RF multi-feed structure to improve plasma uniformity

Patent 9711330 was granted and assigned to Applied Materials on July, 2017 by the United States Patent and Trademark Office.

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Patent abstract

A plasma source assembly for use with a processing chamber is described. The assembly includes a multi-feed RF power connection to a single or multiple RF hot electrodes.

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Patent Citations Received
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US Patent 11776793 Plasma source with ceramic electrode plate
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US Patent 09711330 RF multi-feed structure to improve plasma uniformity US Patent 9711330 RF multi-feed structure to improve plasma uniformity

Infobox
Patent Number
0971133000
Patent Number
971133000
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=0971133000
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
097113300
Date of Patent
July 18, 2017
0
Patent Application Number
151509680
Date Filed
May 10, 2016
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=097113300
Patent Primary Examiner
‌
Tung X Le
0
Edits on 24 Sep, 2022
"Entity importer update"
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edited on 24 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Applicant
Applied Materials
Applied Materials
0
Current Assignee
Applied Materials
Applied Materials
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
097113300
Date of Patent
July 18, 2017
0
Patent Application Number
151509680
Date Filed
May 10, 2016
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=097113300
Patent Primary Examiner
‌
Tung X Le
0
Edits on 15 Jun, 2022
"Entity importer update"
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Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09711330
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 US Patent 09711330 RF multi-feed structure to improve plasma uniformity

Infobox
Is a
Patent
Patent
Patent applicant
Applied Materials
Applied Materials
Current assignee
Applied Materials
Applied Materials
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09711330
Date of patent
July 18, 2017
Patent application number
15150968
Date Filed
May 10, 2016
Patent primary examiner
‌
Tung X Le

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