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US Patent 9706630 Galvanically isolated output variable pulse generator disclosure

Patent 9706630 was granted and assigned to Eagle Harbor Technologies, Inc. on July, 2017 by the United States Patent and Trademark Office.

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Applicant
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
1
Current Assignee
Eagle Harbor Technologies, Inc.
Eagle Harbor Technologies, Inc.
1
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
97066301
Patent Inventor Names
John G. Carscadden1
Ilia Slobodov1
James Prager1
Kenneth E. Miller1
Timothy Ziemba1
Date of Patent
July 11, 2017
1
Patent Application Number
146359911
Date Filed
March 2, 2015
1
Patent Citations Received
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US Patent 12111341 In-situ electric field detection method and apparatus
2
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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
3
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US Patent 11887813 Pulsed voltage source for plasma processing
4
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US Patent 11875971 Efficient energy recovery in a nanosecond pulser circuit
5
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US Patent 11967484 Ion current droop compensation
6
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US Patent 11967483 Plasma excitation with ion energy control
7
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US Patent 11972924 Pulsed voltage source for plasma processing applications
8
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Patent Primary Examiner
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Nguyen Tran
1
Patent abstract

A pulse generator is disclosed that includes at least the following stages a driver stage, a transformer stage, a rectifier stage, and an output stage. The driver stage may include at least one solid state switch such as, for example, of one or more IGBTs and/or one or more MOSFETs. The driver stage may also have a stray inductance less than 1,000 nH. The transformer stage may be coupled with the driver stage and/or with a balance stage and may include one or more transformers. The rectifier stage may be coupled with the transformer stage and may have a stray inductance less than 1,000 nH. The output stage may be coupled with the rectifier stage. The output stage may output a signal pulse with a voltage greater than 2 kilovolts and a frequency greater than 5 kHz. In some embodiments, the output stage may be galvanically isolated from a reference potential.

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