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US Patent 9674939 Method for producing a mechanically autonomous microelectronic device

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Patent abstractTimelineTable: Further ResourcesReferences
Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
96749391
Patent Inventor Names
Mark Scannell1
Date of Patent
June 6, 2017
1
Patent Application Number
143106041
Date Filed
June 20, 2014
1
Patent Citations Received
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US Patent 12113056 Stacked dies and methods for forming bonded structures
2
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3
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4
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US Patent 12068278 Processed stacked dies
5
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US Patent 12080672 Direct gang bonding methods including directly bonding first element to second element to form bonded structure without adhesive
6
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US Patent 11658173 Stacked dies and methods for forming bonded structures
7
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US Patent 11764189 Molded direct bonded and interconnected stack
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US Patent 11837596 Stacked dies and methods for forming bonded structures
8
...
Patent Primary Examiner
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Xiaoliang Chen
1
Patent abstract

The invention relates to a method for producing a mechanically autonomous microelectronic device comprising at least one electric via enabling an electric connection from at least one first face of the device, characterized in that it comprises the following sequence of operations:from a first substrate comprising a first portion of the electric via exposed to a first face of the first substrate, and from a second substrate comprising a second portion of the electric via exposed to a first face of the second substrate, a step of bonding of the first substrate onto the second substrate, by bonding the first faces thereof so that the first portion and the second portion of the electric via are in electrical continuity,step of partially removing a part of the first substrate from a second face of the first substrate, opposite the first face of said first substrate, so as to reach the first portion of the electric via.

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