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US Patent 11658173 Stacked dies and methods for forming bonded structures

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Is a
Patent
Patent
0

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
116581730
Date of Patent
May 23, 2023
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Patent Application Number
171313290
Date Filed
December 22, 2020
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Patent Citations
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US Patent 8802538 Methods for hybrid wafer bonding
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US Patent 10892246 Structures and methods for low temperature bonding using nanoparticles
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US Patent 10923413 Hard IP blocks with physically bidirectional passageways
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US Patent 10950547 Stacked IC structure with system level wiring on multiple sides of the IC die
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US Patent 10964664 DBI to Si bonding for simplified handle wafer
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US Patent 10985133 Die processing
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US Patent 10991804 Transistor level interconnection methodologies utilizing 3D interconnects
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US Patent 10998292 Offset pads over TSV
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...
Patent Citations Received
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US Patent 11764189 Molded direct bonded and interconnected stack
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US Patent 11837582 Molded direct bonded and interconnected stack
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US Patent 11916054 Stacked devices and methods of fabrication
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US Patent 11955463 Direct bonded stack structures for increased reliability and improved yield in microelectronics
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US Patent 12113056 Stacked dies and methods for forming bonded structures
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US Patent 12080672 Direct gang bonding methods including directly bonding first element to second element to form bonded structure without adhesive
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Patent Primary Examiner
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Jasmine J Clark
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CPC Code
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H01L 21/304
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H01L 21/306
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H01L 21/3081
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H01L 21/561
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H01L 21/683
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H01L 25/0657
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H01L 25/50
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In various embodiments, a method for forming a bonded structure is disclosed. The method can comprise mounting a first integrated device die to a carrier. After mounting, the first integrated device die can be thinned. The method can include providing a first layer on an exposed surface of the first integrated device die. At least a portion of the first layer can be removed. A second integrated device die can be directly bonded to the first integrated device die without an intervening adhesive.

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