Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Wieland Pethe0
Bernd Kallauch0
Dirk Noack0
Date of Patent
May 9, 2017
Patent Application Number
14791784
Date Filed
July 6, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of treating a semiconductor device is provided including the steps of loading the semiconductor device in a processing chamber, pressurizing the processing chamber by supplying a processing gas from a pressure chamber to the processing chamber, performing a thermal anneal of the semiconductor device in the processing chamber, and depressurizing the processing chamber by supplying the processing gas from the processing chamber to the pressure chamber.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
