US Patent 9556363 Copper barrier chemical-mechanical polishing composition
Patent 9556363 was granted and assigned to Cabot Microelectronics (company) on January, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 25, 2015
0
Date of Patent
January 31, 2017
0
Patent Applicant
Patent Application Number
14750271
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Patent Citations Received
Patent Inventor Names
Lin Fu
0
Wei Weng
0
Alexei Leonov
0
Jeffrey Dysard
0
Lei Liu
0
Steven Grumbine
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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