Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
February 9, 2016
Patent Application Number
13818154
Date Filed
August 23, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of forming a thin film on a substrate which includes a step of contacting a surface with a precursor compound having a transition metal and one or more alkyl-1,3-diazabutadiene ligands is provided. The resulting modified surface is then contacted with an activating compound.
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