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US Patent 11753727 Protection of components from corrosion

Patent 11753727 was granted and assigned to Applied Materials on September, 2023 by the United States Patent and Trademark Office.

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Contents

Is a
Patent
Patent

Patent attributes

Patent Applicant
Applied Materials
Applied Materials
Current Assignee
Applied Materials
Applied Materials
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11753727
Patent Inventor Names
Sukti Chatterjee
David Thompson
David Britz
Pravin K. Narwankar
Yuriy Melnik
Date of Patent
September 12, 2023
Patent Application Number
17313863
Date Filed
May 6, 2021
Patent Citations
‌
US Patent 7262133 Enhancement of copper line reliability using thin ALD tan film to cap the copper line
‌
US Patent 7264846 Ruthenium layer formation for copper film deposition
‌
US Patent 7265048 Reduction of copper dewetting by transition metal deposition
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US Patent 7279432 System and method for forming an integrated barrier layer
‌
US Patent 7285312 Atomic layer deposition for turbine components
‌
US Patent 7317229 Gate electrode structures and methods of manufacture
‌
US Patent 7371467 Process chamber component having electroplated yttrium containing coating
‌
US Patent 7396565 Multiple precursor cyclical deposition system
...
Patent Primary Examiner
‌
Bret P Chen
CPC Code
‌
C23C 16/40
‌
C23C 16/52

Using the systems and methods discussed herein, CMAS corrosion is inhibited via CMAS interception in an engine environment and/or is prevented or reduced by the formation of a metal oxide protective coating on a hot engine section component. The CMAS interception can occur while the engine is in operation in flight or in a testing or quality control environment. The metal oxide protective coating can be applied over other coatings, including Gd-zirconates (GZO) or yttria-stabilized zirconia (YSZ). The metal oxide protective coating is applied at original equipment manufacturers (OEM) and can also be applied in-situ using a gas injection system during engine use in-flight or during maintenance or quality testing. The metal oxide protective coating contains a rare earth element, aluminum, zirconium, chromium, or combinations thereof.

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