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US Patent 9109296 Method for etching conductive metal oxide layer using microelectrode

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Is a
Patent
Patent
1

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
1
Patent Number
91092961
Date of Patent
August 18, 2015
1
Patent Application Number
136370031
Date Filed
March 25, 2011
1
Patent Citations Received
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...
Patent Primary Examiner
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Nicholas A Smith
1
Patent abstract

A method for etching a selected area of a conductive metal oxide layer deposited on a support is provided. The method comprises removing the area via electrochemical route in the presence of a polarized microelectrode and an electrochemical solution. In addition, an etched layer obtained with the foregoing method is provided.

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