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US Patent 8916056 Biasing system for a plasma processing apparatus

Patent 8916056 was granted and assigned to Varian Semiconductor Equipment Associates on December, 2014 by the United States Patent and Trademark Office.

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Patent Citations Received
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US Patent 12125673 Pulsed voltage source for plasma processing applications
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US Patent 12111341 In-situ electric field detection method and apparatus
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US Patent 12106938 Distortion current mitigation in a radio frequency plasma processing chamber
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US Patent 11984306 Plasma chamber and chamber component cleaning methods
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US Patent 11972924 Pulsed voltage source for plasma processing applications
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US Patent 11967483 Plasma excitation with ion energy control
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US Patent 11948780 Automatic electrostatic chuck bias compensation during plasma processing
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US Patent 11887813 Pulsed voltage source for plasma processing
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US Patent 11791138 Automatic electrostatic chuck bias compensation during plasma processing
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US Patent 11776789 Plasma processing assembly using pulsed-voltage and radio-frequency power
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Patent Inventor Names
Bon-Woong Koo0
Richard M. White0
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US Patent 11699572 Feedback loop for controlling a pulsed voltage waveform
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=089160560
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US Patent 08916056 Biasing system for a plasma processing apparatus US Patent 8916056 Biasing system for a plasma processing apparatus

Infobox
Patent Number
089160560
Patent Number
89160560
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Infobox
Is a
Patent
Patent
0
Current Assignee
Varian Semiconductor Equipment Associates
Varian Semiconductor Equipment Associates
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
089160560
Date of Patent
December 23, 2014
0
Patent Application Number
136491590
Date Filed
October 11, 2012
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=089160560
Patent Primary Examiner
‌
Shamim Ahmed
0
Edits on 15 Jun, 2022
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edited on 15 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=08916056
Edits on 28 Dec, 2021
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created this topic on 28 Dec, 2021
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 US Patent 08916056 Biasing system for a plasma processing apparatus

Infobox
Is a
Patent
Patent
Current assignee
Varian Semiconductor Equipment Associates
Varian Semiconductor Equipment Associates
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
08916056
Date of patent
December 23, 2014
Patent application number
13649159
Date Filed
October 11, 2012
Patent primary examiner
‌
Shamim Ahmed

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